The ACTMOST programme has been finalised and replaced by the ACTPHAST programme. Please check the ACTPHAST website to discover how ACTPHAST can accelerate your photonics innovation.
Microstage XY Combdrive
Electrostatic comb-drive actuator fabricated by Deep Reactive Ion Etching (DRIE) of silicon-on-insulator (SOI) wafer.
Support for industry 
Did you know?
Did you know?
Contact
Mrs. Nathalie Debaes
Project support officer
+32 2 629 10 18
Supported by
Our partners
© Actmost 2010