The ACTMOST programme has been finalised and replaced by the ACTPHAST programme. Please check the ACTPHAST website to discover how ACTPHAST can accelerate your photonics innovation.
microstage XY wafer 2
Structures of MEMS X-Y microstage fabricated on 4-inch SOI wafer.
Support for industry 
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Contact
Mrs. Nathalie Debaes
Project support officer
+32 2 629 10 18
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