Microstage XY General view
MEMS electrostatic comb-drive X-Y microstage for precise displacement of micro-optical components (microlens, diffraction grating). Displacement range: ±35μm at 100 V of applied voltage.
MEMS electrostatic comb-drive X-Y microstage for precise displacement of micro-optical components (microlens, diffraction grating). Displacement range: ±35μm at 100 V of applied voltage.